Steklo i Keramika (Glass and Ceramics). Monthly scientific, technical and industrial journal

 

ISSN 0131-9582 (Online)

Composition and structure of quartz thin films on metals

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Autors: O. M. Kanunnikova, S. F. Lomaeva, A. A. Shakov, and F. Z. Gil'mutdinov
  • Continuous numbering: 902
  • Pages: -
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Heading: Coatings. Enamels.

The methods of X-ray electron spectroscopy and atomic force microscopy are used to study thin films of quartz on steel and copper obtained by the method of cathodic sputtering of silicon in oxygen. The kinetics of film formation is considered. Tab. 2, ill. 4, bibliography: 22 titles.
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O. M. Kanunnikova, S. F. Lomaeva, A. A. Shakov, and F. Z. Gil'mutdinov Composition and structure of quartz thin films on metals. Steklo i keramika. 2003:76(2):-. (in Russ). UDK 539.215.216.2:546.28
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Lyudmila Vladimirovna Sokolova