The results of studies of the structural-phase state and physicomechanical properties of coatings of the Al-Si-N and Zr-YO systems with a thickness of 3 ?m, obtained by the method of pulsed magnetron deposition on the surface of single-crystal m-Si, are presented. In the course of the studies carried out, it was found that the light transmission coefficient in the visible region of the spectrum for coatings Al-Si-N and Zr-YO reaches 83 and 78 & # 37; respectively. The results of the study of mechanical properties showed that the crack resistance of m-Si samples with protective coatings is 2-3 times higher than that of the original silicon samples. The results of laboratory tests of the resistance of the studied samples to shock loads when interacting with a flow of high-speed (5 - 7 km / s) solid microparticles of Fe showed that the deposition of protective coatings 3 ?m thick on m-Si samples makes it possible to suppress the processes of erosion of the surface of the latter by preventing the formation of small craters
Cand. physical-mat. Sciences I. A. BOZHKO
1, 2 (
e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it. ), M.P. KALASHNIKOV < sup> 1, 2 , cand. physical-mat. Sciences M. V. FEDORISHCHEVA
1, 2 , Dr. Tech. Sci. Yu. F. Khristenko
3 , Dr. V. P. SERGEEV
1, 2 ;
1 FGBUN & # 171; Institute of Strength Physics and Materials Science, Siberian Branch of RAS & # 187; (IPPM SB RAS) (Russia, Tomsk)
2 National Research Tomsk Polytechnic University (Russia, Tomsk)
3 National Research Tomsk State University (Russia, Tomsk)
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