In this paper the experience of using regular and specially developed resistive pastes for resistors compatible with LTCC substrates is reviewed. Characteristics of surface, buried, and 3D resistors manufactured using DuPont, Ferro, Shoei, and ESL pastes on ceramics from various manufacturers are examined. Results of a study of the resistors' microstructure, phase and elemental composition, sheet resistance, tolerance, hot (HTCR) and cold (CTCR) temperature coefficient of resistance, frequency behaviour, noise indices, gauge factors, as well as their performance after thermal aging, laser trimming, and high-voltage pulse loads are presented. The influence of process conditions, resistor dimensions and the physicochemical interactions of the materials on these characteristics is assessed.
Mikhail K. Kutuzov – Candidate of Physical and Mathematical Sciences, deputy director LLC “ELMA-PASTE”, Zelenograd, Moscow Region, Russia
Igor V. Matveev – general director, LLC “ELMA-PASTE”, Zelenograd, Moscow Region, Russia
Daria A. Volkova – engineer-technologist of the 2nd category, JSC “RPC “Istok” named after Shokin”, Fryazino, Moscow Region, Russia
Vladimir S. Goryainov – head of the Laboratory, JSC “RPC “Istok” named after Shokin”, Fryazino, Moscow Region, Russia
Denis N. Polozov – head of Sector, JSC “RPC “Istok” named after Shokin”, Fryazino, Moscow Region, Russia
Vitaly M. Kolomin – Candidate of Technical Sciences, deputy head of the Division for Scientific Work, JSC “RPC “Istok” named after Shokin”, Fryazino, Moscow Region, Russia
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