The paper presents the results on the formation of boron-based coatings by precipitation of target material from a vapor-plasma phase formed by electron beam exposure to a solid-state target in the forevacuum pressure range. The physicomechanical properties of coatings formed when inert, active, and reactive gases are injected into the region of interaction between an electron beam and a target are investigated. It is shown that a change in the gaseous medium in the region of vapor deposition of the boron target on a titanium substrate does not significantly affect the hardness during nanoindentation (H) and the modulus of elasticity (E) of the formed coatings. At the same time, the obtained hardness values during nanoindentation vary from 19.5 to 20.3 GPa, and the modulus of elasticity varies from 182.5 to 207.7 GPa. Nevertheless, the injection of reactive and active gases into the working volume of the vacuum chamber has a significant effect on the adhesion resistance and roughness of such coatings. It was found that the use of N2 in the deposition of boron-containing vapors increases the adhesive properties of coatings (critical load 22.78 N), while the coating roughness is the highest Ra = 0.306 microns. The injection of O2 into the deposition area contributes to the formation of coatings with the lowest roughness (Ra = 0.045 microns) and adhesive resistance (critical load 0.6 N).
Sergey A. Salnikov – postgraduate student, Department of Physics, Tomsk State University of Control Systems and Radio Electronics, Tomsk, Russia
Artem A. Andronov – postgraduate student, Department of Physics, Tomsk State University of Control Systems and Radio Electronics, Tomsk, Russia
Denis B. Zolotukhin – Doctor of Physical and Mathematical Sciences, Associate Professor, Department of Physics, Tomsk State University of Control Systems and Radio Electronics, Tomsk, Russia
Andrey V. Tyunkov – Doctor of Technical Sciences, Associate Professor, Department of Physics, Tomsk State University of Control Systems and Radio Electronics, Tomsk, Russia
Yuri G. Yushkov – Doctor of Technical Sciences, Associate Professor, Department of Physics, Tomsk State University of Control Systems and Radio Electronics, Tomsk, Russia
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