FINISHING OF THE SURFACE OF CORUNDUM CERAMICS WITH AN ARGON CLUSTER-ION BEAM

Marina V. Yakovleva – laboratory assistant, Department of Applied Physics, Novosibirsk State University, Novosibirsk, Russia
Nikolay G. Korobeishchikov – Doctor of Physical and Mathematical Sciences, leading researcher, Department of Applied Physics, Novosibirsk State University, Novosibirsk, Russia
Ivan V. Nikolaev – Candidate of Physical and Mathematical Sciences, senior researcher, Department of Applied Physics, Novosibirsk State University, Novosibirsk, Russia
Alexander V. Lukyanov – leading engineer, Department of Applied Physics, Novosibirsk State University, Novosibirsk, Russia
Yevgeny A. Monastyrev – general director, JSC Scientific Research Institute of Semiconductor Devices, Tomsk, Russia
Irina D. Filimonova – head of the Technological Complex, JSC Scientific Research Institute of Semiconductor Devices, Tomsk, Russia
Daniil K. Avvakumov – technician, JSC Scientific Research Institute of Semiconductor Devices, Tomsk, Russia

1. Zemtsova E. G., Monin A. V., Smirnov V. M., et al. Formation and mechanical properties of alumina ceramics based on Al2O3 micro- and nanoparticles // Physical Mesomechanics. 2015. V. 18. P. 134 – 138.
2. Parikh P. B. Alumina ceramics: engineering applications and domestic market potential // Transactions of the Indian Ceramic Society. 2014. V. 54(5). P. 179 – 184.
3. Treccani L., Klein T. Y., Meder F., et al. Functionalized ceramics for biomedical, biotechnological and environmental applications // Acta Biomaterialia. 2013. V. 9. P. 7115 – 7150.
4. Лукин Е. С., Ануфриева Е. В., Попова Н. А. и др. Анализ микроструктуры, качества поверхности и свойств подложек из оксида алюминия // Стекло и керамика. 2010. Т. 83, № 9. С. 9 – 14. [Lukin E. S., Anufrieva E. V., Popova N. A., et al. Analysis of surface microstructure and quality and properties of aluminum oxide substrates // Glass Ceram. 2011. V. 67. P. 271 – 276.]
5. Анисимов А. Г., Безлепкин В. А., Мали В. И. К вопросу получения высокоплотной корундовой керамики с бездефектной полированной поверхностью и низкой шероховатостью методом SPS // Стекло и керамика. 2021. Т. 94, № 10. С. 24 – 28. [Anisimov A. G., Bezlepkin V. A., Mali V. I. On the matter of obtaining high-density corundum ceramics with a defect-free polished surface and low roughness by SPS // Glass Ceram. 2022. V. 78. P. 402 – 405.]
6. Xie K. G., Xie Y., Deng H. Gas cluster ion beam smoothing technique: A review // Nanomanufacturing and Metrology. 2025. V. 8, No. 12.
7. Yamada I., Matsuo J., Toyoda N., et al. Progress and applications of cluster ion beam technology // Current Opinion in Solid State and Materials Science. 2015. V. 19. P. 12 – 18.
8. Fenner D., DiFilippo V., Bennet J., et al. Ion-beam nano-smoothing of sapphire and silicon carbide surfaces // Proceedings of SPIE. 2001. V. 4468. P. 17 – 24.
9. Zarvin A. E., Korobeishchikov N. G., Kalyada V. V., et al. Formation of mixed clusters in a pulsed supersonic helium-oxygen-isoprene jet // European Physical Journal D. 2008. V. 49(1). P. 101 – 110.
10. Korobeishchikov N. G., Nikolaev I. V., Atuchin V. V., et al. Quantifying the surface modification induced by the argon cluster ion bombardment of KGd(WO4)2:Nd single crystal // Materials Research Bulletin. 2023. V. 158. Art. 112082.
11. Chernysh V. S., Ieshkin A. E., Kireev D. S., et al. Interaction of gas cluster ions with solids: Experiment and computer simulations // Surface and Interfaces. 2020. V. 388. Art. 125608.
12.Seah M. P. Universal equation for argon gas cluster sputtering yields // J. Phys. Chem. C. 2013. V. 117. P. 12622 – 12632.