Sol-gel method from film-forming solutions based on tetraethoxysilane and phosphoric acid, ethyl alcohol, water, thin films and dispersed products were obtained in the SiO 2 - P 2 O 5 system at a molar content of phosphorus oxide from 0 to 30%. Regularities of changes in rheological properties in successive states of the solution - sol - gel system have been established. Physicochemical processes in solution, when applied to a substrate and during heat treatment of products have been investigated. Using the methods of IR spectroscopy and atomic force microscopy, the structure of the obtained films and dispersed products, as well as their physicochemical properties, have been studied. Tab. 4, ill. 4, bibliography: 7 titles.