This paper presents the results of annealing synthetic quartz glass of high purity at a temperature of 250 ?C and an elevated pressure of 7 MPa in an atmosphere of molecular hydrogen. Annealing under these conditions makes it possible to increase the transmission coefficient at a wavelength of 190 nm by 2 %. The absorption of quartz glass in the range from 238 to 254 nm corresponds to defects in the structural grid of quartz glass, namely, transitions of silicon oxygen-deficient centers of the non-bridge oxygen type, which are deactivated by atomic hydrogen to form stable Si–O–H hydroxyl groups, which in turn reduces absorption in the range from 238 to 254 nm. Using IR Fourier spectroscopy, it was found that the diffusion of molecular hydrogen produces a peak in the wavenumber range from 4200 to 4100 cm–1 and corresponds to molecular hydrogen dissolved in the structural grid of quartz glass.